基于复合封装薄膜的水汽透过率测试系统研究

Study on Test System for Water Vapor Transmission Rate in Composite Thin Film Encapsulation

摘要: 基于活泼金属(钙、镁)电学法设计研发了用于老化测试环境下的水汽透过率测试仪器, 测试精度达到10^-6g ·m^-2· d^-1.利用本测试仪器测试了不同叠层次数的Al₂O₃/ZrO₂复合薄膜的水汽透过率, 结果表明, 多次叠层后的Al₂O₃/ZrO₂复合薄膜的水汽阻隔性能得到了较好提升.

Abstract: Based on active metal (Ca, Mg) electrical test, a new type of water vapor transmission rate (WVTR) measurement system for aging environment was designed and the precision was. 10^-6 g·m^-2·d^-1. The WVTR of the Al₂O₃/ZrOz composite films with different layers were tested based on the system. The results show that the moisture barrier properties of the Al₂O₃/ZrO₂ composite thin films after stacking have been improved.