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李意, 张建华, 楼志斌, 殷录桥. 玻璃/玻璃激光封装系统设备研究[J]. 应用技术学报, 2017, 17(1): 60-66. DOI: 10.3969/ji.ssn.2096-3424.2017.01.013
引用本文: 李意, 张建华, 楼志斌, 殷录桥. 玻璃/玻璃激光封装系统设备研究[J]. 应用技术学报, 2017, 17(1): 60-66. DOI: 10.3969/ji.ssn.2096-3424.2017.01.013
LI Yi, ZHANG Jianhua, LOU Zhibin, YIN Luqiao. Researchon Glass/Glass Laser Encapsulation System[J]. Journal of Technology, 2017, 17(1): 60-66. DOI: 10.3969/ji.ssn.2096-3424.2017.01.013
Citation: LI Yi, ZHANG Jianhua, LOU Zhibin, YIN Luqiao. Researchon Glass/Glass Laser Encapsulation System[J]. Journal of Technology, 2017, 17(1): 60-66. DOI: 10.3969/ji.ssn.2096-3424.2017.01.013

玻璃/玻璃激光封装系统设备研究

Researchon Glass/Glass Laser Encapsulation System

  • 摘要: 设计与研发了激光封装设备, 完成了可用于玻璃/玻璃激光键合的成套封装系统, 集成视觉识别视觉定位、功率随路径的比例积分微分(PID)控制、X-Y两平台运动控制功能, 可实现定位误差为5 μm、激光功率跳动小于0.2 W、识别定位时间小于2 s的高精度快速激光封装.利用本仪器可以对视场范围内任意尺寸的矩形玻璃料线框进行激光封装, 结果表明, 激光封装系统可以实现迅速高效封装.

     

    Abstract: Laser packaging equipment has been designed and developed to complete the glass/glass laser bonding that can integrate the functions of visual recognition, visual positioning, PID control of power with path, and X-Y two platform motion control. The positioning erroris 5 μm; laser power jitter is less than 0.2 W; the positioning time is less than 2 s. The instrument can be used in the field of view of anysize rectangular glass wire frame laser packaging, and the results show that the laser packaging system can achieve rapid and efficient packaging.

     

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