Study on Test System for Water Vapor Transmission Rate in Composite Thin Film Encapsulation

Based on active metal (Ca, Mg) electrical test, a new type of water vapor transmission rate (WVTR) measurement system for aging environment was designed and the precision was. 10^-6 g·m^-2·d^-1. The WVTR of the Al₂O₃/ZrOz composite films with different layers were tested based on the system. The results show that the moisture barrier properties of the Al₂O₃/ZrO₂ composite thin films after stacking have been improved.