非晶合金薄膜的制备和韧性优化措施

张而耕; 王亚琨; 梁丹丹; 陈强; 周琼; 黄彪

doi:10.3969/j.issn.2096-3424.2024.01.006

非晶合金薄膜的制备和韧性优化措施

doi: 10.3969/j.issn.2096-3424.2024.01.006

上海应用技术大学机械工程学院上海物理气相沉积(PVD)超硬涂层及装备工程技术研究中心, 上海 201418

基金项目: 上海市优秀技术带头人计划项目（22XD1434500）；上海应用技术大学引进人才基金项目（YJ2022-31）；上海应用技术大学协同创新基金项目(XTCX2022-24)资助

详细信息

作者简介:
张而耕（1973-），男，教授，博士，主要研究方向为超硬纳微米PVD涂层、机械制造和材料失效分析。E-mail:zhangeg@yeah.net

通讯作者:
梁丹丹（1987-），女，讲师，博士，主要研究方向为非晶合金、涂层材料和表面防护。 E-mail:liang.d.d@163.com

中图分类号: TG132
计量
- 文章访问数: 62
- HTML全文浏览量: 42
- PDF下载量: 9
- 被引次数: 0
出版历程
- 收稿日期: 2023-02-20
- 网络出版日期: 2024-01-26
- 刊出日期: 2024-03-30

Fabrication and toughness optimization methods of metallic glass films

Shanghai Engineering Research Center of Physical Vapor Deposition (PVD) Superhard Coatings and Equipment, School of Mechanical Engineering, Shanghai Institute of Technology, Shanghai 201418, China

摘要

摘要: 由于原子排列短程有序、长程无序，且不具有晶界、位错、第二相等典型晶体缺陷，非晶合金表现出高强度、高硬度以及优异的耐磨性、耐腐蚀性等优异性能。但是非晶合金的本征脆性以及有限的玻璃形成能力极大地限制了其工业应用，非晶合金薄膜的韧性优化便成了当今研究的热点问题。针对非晶合金薄膜的制备以及韧性优化措施进行综述，同时对非晶合金薄膜日后的发展趋势及未来的研究趋势进行了展望。
- 非晶合金薄膜 /
- 物理气相沉积 /
- 韧性 /
- 元素掺杂 /
- 界面
Abstract: Metallic glasses have the advantages of high strength, high hardness, excellent wear resistance and corrosion resistance due to their short range ordered atoms, long range disordered atoms, and the lack of typical crystal defects such as grain boundaries, dislocations, and the second phase. However, the intrinsic brittleness and the limited glass forming ability of metallic glasses greatly limit their industrial application. Thus, the optimization of the toughness of metallic glasses has become a hot issue in current research. In this paper, the preparation and toughness optimization of metallic glass films are reviewed. Meanwhile, the future development trend of metallic glass films are prospected.
- metallic glass /
- physical vapor deposition (PVD) /
- toughness /
- element doping /
- interface

HTML全文

图 1 非晶合金的TEM图像^[2]

Figure 1. The TEM image of metallic glasses^[2]

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图 2 (a) Fe基BMG的显微硬度和抗压强度曲线^[2]；(b)Fe基BMG和316L合金在不同电解质溶液中的动电位极化曲线^[4]

Figure 2. (a)Microhardness and compressive strength of Fe-based BMG^[2], (b)potentiodynamic polarization curves of Fe-based BMG and 316L alloy in various electrolyte solutions^[4]

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图 3 (a) S1、S2和S3非晶合金的压缩薄片；(b) S2非晶合金弯曲成不同形状，表现出特殊的变形能力；(c) S2非晶合金在不同标称应变下形变^[13]

Figure 3. (a) Compressed sheets of S1, S2 and S3 amorphous alloys, (b) S2 amorphous alloy bends into different shapes, showing special deformation ability, (c) S2 amorphous alloy deforms under different nominal strains^[13]

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图 4 Cu-Zr磁控溅射实验装置

Figure 4. Cu-Zr magnetron sputtering

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图 5 TiCuNi薄膜的AFM图像^[24]

Figure 5. AFM image of TiCuNi thin film^[24]

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图 6 Cu-Zr合金薄膜表面形貌 (a) 磁控溅射； (b) 多弧离子镀^[22]

Figure 6. Surface morphology of Cu-Zr thin films (a) magnetron sputtering, (b) multi-arc ion plating^[22]

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图 7 PLD沉积技术的原理图^[25]

Figure 7. Schematic representation of the PLD deposition technique^[25]

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图 8 (a) Fe₄₇Cr₂₀Mo₁₀C₁₅B₆Y₂和(b) Fe₄₅Cr₂₀Mo₁₀W₂C₁₅B₆Y₂ BMG压缩试验后铸态玻璃棒材的断口形貌

Figure 8. Fracture morphology of as-cast glassy rods after compressive tests on the (a) Fe₄₇Cr₂₀Mo₁₀C₁₅B₆Y₂ and (b) Fe₄₅Cr₂₀Mo₁₀W₂C₁₅B₆Y₂ BMG

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